KXTC9-2050 (KIONIX)

The KXTC9-2050 is a tri-axis high-performance Analogue Accelerometer with a full-scale output range of ±2g (19.6 m/s/s). The sense element is fabricated using Kionix's proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The KXTC9 features a factory programmable low pass filter.